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Edwards AUTO 306, Sputtering System
Ref :
1172294-9-W
Condition :
Used
Manufacturer :
Edwards
Model :
AUTO 306, Sputtering System
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
14 Aug. 2014
Brand: Edwards
Model: AUTO 306
SPUTTERING SYSTEM
Specifications
• Used
• Stainless steel chamber (12" dia. X 10.5 tall with viewport)
• RF sputtering supply and manual valving
• 4 target sputter with dual sputtering guns
• Glow discharge (for soft etch)
• ION gauge to measure vacuum level at 10-7
• Mass flow control for 2 gauges and simultaneous sputtering
• Micrometer adjusted gas input
• Pirani guage
• 500 L/S turbo pump
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