EVG 101

- Semi-Automatic, with Manual loading
- Suitable for wafer sizes 3" - 8" wafers (with proper chuck)
- Currently configured for 4"/100mm wafers
- One Coat Module
- One Cleaning Module
- Base frame for one resist processing module including all electronics, pneumatics, tubing for solvents, and exhaust lines
- Manual loading and mechanical pre-aligner (pneumatically actuated)
- PC controlled with windows based graphical user interface
- Password protected access levels
- Programmable rotational speed for substrate
- Syringe dispense option included
- Spinner chuck for 4" wafers
- Operations Manual and Documentation included.