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EVG 120

Ref : 2121261-9-FM
Condition : Used
Manufacturer : EVG
Model : 120
Year(s) : 2003
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

- Automated Resist Processing Station
- 2 Spin Stations: Coat Station & Develop Station
- Bake, Chill & Vapor Prime Modules
- Send/Receive Cassette Station with Ergo Load Mounts
- Cassette to Cassette Handling
- Up to 8"/200mm Wafer Capable
- Resist and Solvent Level Sensing System with Software Display for Resist Filling Level

- Station 1: Spin Coating Station
• PTFE Spin Chamber
• Programmable Drive Unit for up to 10,000 RPM
• Programmable Dispense Arm for Centre, Edge, and Area Dispense
• For use with 4 Different Resist Lines
• Bowl Wash Cover included
• 3x Cybor Pump
• 1x Top Side Edge Bead Removal (EBR) System for Spin Coating
• 1x Backside Rinse (BSR) for Spin Coating
• Spinner Chuck: request at time of order

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