FEI V600CE-S Sidewinder ion column

Sidewinder column 500–30kV
Milling Power: up to 65nA beam current
and 100 A/cm² current density
CDEM for ions and electron images with 7nm resolution
Win XP OS and FEI xT;
TSS networking computer to make IT happy
PIA (Patterning, Imaging and Acquisition system)
5-axis Piezo driven motorized eucentric tilt stage
Full coverage of 150mm diameter sample
Chamber scope for real time observation
Infrared Camera (IR) for real time observation
Gas Injection System: Max 4 injectors; 2 included
chemistry of choice
Vacuum System oil free consisting of IGP
air cooled Turbo and dry PVP