KLA-Tencor Surfscan 6200

Description
- Bare Wafer Surface Defect Inspection System
- Max Wafer Capable: 8”/200mm
- System configured for 8“/200mm wafers
- Defect Sensitivity: 0.12um
- Defect Map and Histogram with Zoom
- Haze Map and Histogram with Zoom
- Argon Ion Laser (488nm)
- 2D Signal Integration
- Software:
+ Microsoft Windows 98, Version 4.2
+ Software Enhancement
+ Computer Upgrade
- Pentium Computer
- Software Capable for Wafer Map and Histogram
- Parallel Printer Port
- Blower Box
- SECS II Communication Port
- Operations Manual and Documentation