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March PX500

Ref : 2470133-9-W
Condition : Used
Manufacturer : March
Model : PX500
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 28 Jun. 2024

Features

Stainless Steel chamber taking wafers to 4”
13.56 MHz frequency; power output up to 600 W
Microprocessor-controlled
Recipe editor for fast, versatile parameter control
2 mass flow controllers (O2 and N2)

Key Applications and available processes

Photo-resist stripping
Wafer descum/cleaning
Etching of passivation layers
Cleaning of filters and membranes
Chemical trace analysis
MEMS
Photonics

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