MRC

• Cryopump: CTI rebuilt cryopump
• Cryopump Model: CTI 8
• Cryopump Warranty: 1 year
• Compressor: CTI compressor included
• Mechanical Pump: Rebuilt dual stage mechanical pump
• Mechanical Pump Warranty: 1 year
• Vacuum Range: Down to 10⁻⁷
• Load Lock: Included
• Load Lock Pallet Size: Approximately 12 x 12 in
• Part Holding: No holding fixtures required
• Cathodes: 3 cathodes
• Cathode Type: DC
• Cathode Conversion: Optional conversion to RF cathodes with power supply
• Controller: New touch screen controller
• Controller Warranty: 1 year
• Sputter Power Supply Control: Total power programmable on touch screen
• Sputter Process Control: Number of scans programmable on touch screen
• Etch Power Supply Control: Power setting programmable on touch screen
• Etch Process Control: Time setting programmable on touch screen
• Recipe Storage: Up to 10 programs
• Recipe Control: All parameters programmable on touch screen
• Vacuum Control: MFC control of vacuum level programmable on touch screen