Park Systems Inc EP-4 Accurion Nanofilm
EUROPE (Western and Northern)
Imaging ellipsometer in PCSA configuration.
With integrated, motorized Z-axis for height adjustment of the optical head relative to the sample surface.
Max. vertical travel: 100 mm, accuracy: 1 µm, precision: 1 µm. Automatic sample alignment with respect to the plane of incidence.
Max. tilt range: 5°, accuracy: 0.001°, precision: 0.001° in both tilt axes.
Alignment sensor for detecting sample tilt and Z-position.
Max. tilt detection range: 2°, accuracy: 0.001°, Z-axis accuracy: 1 µm.
High-precision, automatic, software-controlled goniometer enabling measurements with variable angle of incidence (AOI).
Focus scanner for fully focused images.
High-quality monochrome GigE CCD camera.
EP4 software package for instrument control, data analysis and ellipsometric modeling.
Fully configured, high-performance PC, 2 LCD monitors and accessories.
2 EP4 light sources.
Separate housing, connected to EP4 via fiber optics.