1/1
Rudolph MP200 Contactless metal thickness measurement
Ref :
2597294-9-W
Condition :
Used
Manufacturer :
Rudolph
Model :
MP200
Short Description :
Contactless metal thickness measurement
Year(s) :
2006
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Contactless metal thickness measurement
Wafer Size Range
Minimum 150 mm
Maximum 200 mm
Multi-Layer Film Capacity YES
Micro Spot Optics YES
Wafer Mapping YES
Controller Type PC Controller Type
External Cooling Water Cooled
Cooling Water Required Minimum Flow: 0.79 GPM (3.00 l/m) Minimum Temperature: 12 ºC (54 ºF, 285.00 ºK) Maximum Temperature: 20 ºC (68 ºF, 293 ºK)
Operating Air Pressure 14.00 PSI (96,534.20 N/sq m)
Vacuum Required 0.98 in Hg (24.89 mm Hg)
Condition Good