Semitool ST 440S

Substrate Size 100 mm
Wafer Size 100 mm
Controller Type Microprocessor Controller Type
Controller Model PSC-101
Resistivity Monitor YES
Rotor Model A82M-12-0215
Built-In Resistivity Monitor Included
SRD Configuration Single Stack
Full Model Number: 440S3-1-E-MI
Casters
Resistivity Monitor
Single Bolt Rotor
Power Requirements 120 V 15.0 A(2) 50/60 Hz 1 Phase
Exterior Dimensions
Width 13.000 in (33.0 cm)
Depth 23.500 in (59.7 cm)
Height 56.000 in (142.2 cm)
Weight 188 lb (85 kg)