United States (USA)
Load-Locked Electron Beam Evaporator with Substrate Heaters. Used thin film deposition system. This fast cycle load-locked evaporator brings the bell jar down to operator level without sacrificing the throw distance. Cryo pumped high vacuum system with roughing pump. 4 pocket gun with Temescal CV-8 power supply. Inficon IC4 Desposition monitor. Bell Jar: 19-1/2 in. ID. Single substrate dome 17 in. dia. with rotation control. Includes substrate heaters. Auto valve sequencer.