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Toho FLX-2320-S Thin Film Stress MeasurementSystem

Ref : 2016126-9-GO
Condition : Used
Manufacturer : Toho
Model : FLX-2320-S
Short Description : Thin Film Stress MeasurementSystem
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 26 Nov. 2019

Description
Calculation of biaxial modulus of elasticity, linear expansion coefficient, stress uniformity, and file subtraction.
• Trend plotting for Statistical Process Control (SPC).
• Calculation of water diffusion coefficient in dielectric films.• Automatic recalculation of stress when film or substrate thickness is corrected.
• 2-D and 3-D views of wafer topography.
• Plotting of the measured stress-temperature curve

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