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Ulvac Ulvac EI-5K Beamer

Ref : Lot: 26
Condition : Used
Manufacturer : Ulvac
Model : Ulvac EI-5K Beamer
Year(s) : 2011
Quantity : 1
Location : Seller or machines location:
South Korea
Last check : 11 Aug. 2020

Ulvac EI-5K Beamer

Type: Batch Type High Vacuum Evaporation System for ITO
Version: 2 inches to 6 inch
Condition: excellent
Vintage: Jun 2011
Sale condition: as is where is
Quantity: 1
Comments:
-Still installed in the fab.
-Shut down and powered off.
-It can be inspected by appointment.
-The equipment is in excellent condition, with no missing parts.
-The equipment was lightly used in an R and D environment for around 2-3 years.
-The equipment ran 4 inch Sapphire wafers
-For the detailed configuration and the gas panel configuration, please refer to the attached photos and PDFs.
-Further information from the system manuals is available on specific request.

Type: Power Supply
Main system: (Including Power supply)
Used amount or use pressure: 3Ø200V±10% 50kVA
Connection: M8 terminal
Type: Cooling Water
Main system: Main system
Used amount or use pressure: 0.2~0.3MPa 8(L/min) or more
Connection: In:3/4Rc Out:3/4Rc
Condition: 20~28℃
Type: Cooling Water
Main system: Cryo compressor
Used amount or use pressure: 0.2~0.3Mpa 7(L/min) or more
Connection: In:3/8Rc Out:3/8Rc
Condition: 20~28℃
Type: Cooling Water
Main system: EB gun
Used amount or use pressure: 0.35~0.7MPa 12(L/min) or more
Connection: In:1/2Rc Out:1/2Rc
Condition: 20~25℃
Type: DRY PUMP (LR 90)
Used amount or use pressure: 0.2~0.3MPa 5L/min or more
Connection: In:3/8Rc Out:3/8Rc .
Condition: 20~28℃
*Water back pressure: Less than 0.05MPa

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