Uvocs T10X10/OES

• Device Type: ultraviolet ozone cleaning system
• Cleaning Method: UV/ozone surface cleaning
• Application Purpose: removal of organic contaminants
• Compatible Surface Material: quartz
• Compatible Surface Material: silicon
• Compatible Surface Material: gold
• Compatible Surface Material: nickel
• Compatible Surface Material: aluminum
• Compatible Surface Material: gallium arsenide
• Compatible Surface Material: alumina
• Thin Film Preparation: suitable for high-adhesion deposition
• Cleaning Time: one to several minutes
• Active Area: 100 square inches
• Parts Tray Type: sliding
• Maximum Parts Tray Height: 1.5 inch
• UV Lamp Wavelength: 245 nm
• Controller Type: digital
• Power Supply: 115 V
• Frequency: 60 Hz
• Current: 2.5 A