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Verteq Cobra-SAWS
Ref :
2669904-9-A
Condition :
Used
Manufacturer :
Verteq
Model :
Cobra-SAWS
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
14 May. 2026
Semiautomatic megasonic wet process tool with HF chemical tank,
VcS tank, robot, and touchscreen,
Windows NT ver.2.5 operating system,
process dual wafer cassettes up to 150mm,
1 module is surfactant/QDR with HALAR tank construction,
VcS megasonic tank of PVDF for prediffusion clean removes particles, metals, SIO2, and organics. VcS (surface clean) uses hydrogen peroxide, ammonium hydroxide, surfactant, and DI water.
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