Verteq Cobra-SAWS

Semiautomatic megasonic wet process tool with HF chemical tank,
VcS tank, robot, and touchscreen,
Windows NT ver.2.5 operating system,
process dual wafer cassettes up to 150mm,
1 module is surfactant/QDR with HALAR tank construction,
VcS megasonic tank of PVDF for prediffusion clean removes particles, metals, SIO2, and organics. VcS (surface clean) uses hydrogen peroxide, ammonium hydroxide, surfactant, and DI water.