AMERICA North (USA-Canada-Mexico)
Yieldup Omega 6200
Megasonic Wafer Cleaning System. Robot assist between 2 tanks. Set up for 2 - 200 mm cassettes. Tank 1: 11 in. L x 20 in. W x 15 in. H is a quartz megasonic tank with 3 - 600W KAJO megasonic generators. Tank 2: 12 in. L x 20 in. W x 14 in. H is a YieldUp dryer tank with N2 purge and gas injection capability. Overall Dimensions: 60 in. L x 60 in. W x 88 in. H. Mfg. Date: 12/97.