ZEISS Zeiss Surfcom measuring machine

Zeiss Surfcom measuring machine
Year of acquisition 2015
Software Acctee Ver_5.14.4.0
PC system accessories
Specifications Measuring range with standard probe arm 1mm
Measurement deviation +/- 2% for a 20 µm groove
Resolution 0.1nm / 6.4 µm range & 10nm / 1000 µm range
Feed path 1000mm (200mm)
Straightness deviation 0.05 (+ L / 1,000) µm
Measuring principle linear motor with glass scale
Resolution 0.016 µm
Number of measuring points max. 32,000
Z-pillar height 450mm (250mm, 650mm)
Travel speed in Z max. 10mm