14 Gasonics Aura 3010

Brand: GaSonics
Model: Aura 3010
Photoresist Asher with SMIF

Used
Details:
A downstream
photoresist removal system
A damage-free asher with closed loop
temperature control. 5 - 8 inch
(125mm-200mm) wafer capability
This tool comes with
optional integrated SMIF by Asyst


Features:
5 - 8 inch (125mm-200mm)
Wafer Capability.
Small footprint
High throughput
Fully automated
downstream microwave asher
SMIF with Asyst LPT-2200 (optional.
Lamp heating for
slow or fast heat ramp
Microwave, lamp
and endpoint detector monitors.
Computer controlled
multiple-step capability
SECS II Interface (optional)