2 TEL, Tokyo Electron Alpha 8 SZ
Ref :
2599477-9-CP
Condition :
Used
Manufacturer :
TEL, Tokyo Electron
Model :
Alpha 8 SZ
Year(s) :
-
Quantity :
2
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Vertical Furnace, Fast Thermal Oxidation process
Version: 200 mm
Vintage: 01.06.2001
CONTROLLER TYPE TS4000Z
Software Version CPU-M: V07.03; CPU-P: V07.03; CPU-
T: VB7.00; CPU-S: V46.01; CPU-I/
O(P): V01.23; CPU-I/O(T): VB7.01
Handler System Wafer Transfer Sysytem 1 OK
Factory Interface SMIF 2 OK
Options System Gas utility Cabinet 1 OK
Others RCU System 1 OK
Others Power Unit 1 OK
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