AG Associates Heatpulse 410
Ref :
2808460-9-A
Condition :
Used
Manufacturer :
AG Associates
Model :
Heatpulse 410
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
- Single-wafer process
- Single rotometer-controlled gas channel
- Multi-step process cycle capability
- 1 to 300 second processing cycle
- Programmable ramp-up rates from 10 to 250 deg C/sec
- 450 to 1150 deg C recommended operating range; 1,250 deg C peak temperature
- Thermocouple temperature control
- PC controller with pCat software
- Power: 208 V, 3-phase, 60 Hz, 90 A
- Compact benchtop footprint: 18 x 16.5 x 10.25 in (W x D x H)
Other machines similar to AG Associates Heatpulse 410
1
Applied Materials P5000 XT
Location :
EUROPE (Western and Northern)
1
Lam Research TCP 9600
Location :
EUROPE (Western and Northern)
Year(s) :
1999
1
CDE (Creative Design Engineering) CDE80/3 Plasma Etch
Location :
EUROPE (Western and Northern)
Year(s) :
1995
1
CDE (Creative Design Engineering) CDE80/2 Plasma Etch
Location :
EUROPE (Western and Northern)
Year(s) :
1995