AIO 8826

Wafer Size Range
Minimum 75 mm
Maximum 150 mm
Photoresist Type Positive
Number of Robots 4
Number of Cassette Elevators 4
Number of Photoresist Coat Stations 2
Number of Photoresist Dispenses 2
Wafer Edge Bead Removal YES
Wafer Backside Rinse YES
Controller Type Microprocessor Controller Type
Accessories
Additional dispense pump available(inquire)

Other Information
Track control: SVG 8636 HPO
Dispense control: CYBOR model 50502
Dispense pump: CYBOR model 5026C
Power supply: CYBOR model 518

Exterior Dimensions
Width 36.000 in (91.4 cm)
Depth 47.000 in (119.4 cm)
Height 38.000 in (96.5 cm)
Weight 725 lb (329 kg)