AMAT, Applied Materials Endura P5000

- Wafer size: 150mm
- 2x Asyst LPT2150 SMIF interface
- Ultra high vacuum Endura HP platform feat. High-speed-wafer transfer, staged vacuum and wafer cassette maping
- 32bit microprocessor control, CRT display and light pen
- Cooldown chamber @ Position B
- Integrated bake-out
- Variable speed programmable loadlock pump down
- System controller / system AC box and primary generator rack
- 2x 9600 cryo compressors and interface equipment
- 1x Neslab heat exchanger
- Electrical supply: Variable input step down Xfrmr 50Hz/60Hz
- 4Chamber: 1) Aluminium, 2) Titanium, 3) TiNitrade, 4) TiW
- 1x holding chamber
- 1x Hi- Temp Degas chamber and 1x Orienter chamber
- All mechanical clamped