AMAT Reflexion LK Copper

Copper CMP
CMP Equipment
Date of Manufacture: 2006-01-01
Currently Configured for: 300mm
Process: CUCMP
Tool config is based on original PO, please verify tool details at tool inspection
Base SystemReflexion LK: 4 head, 3 platen polishing system.
Dry in Dry out.Polisher Skins : Dark P1, P2, P3, and P4: 4910 compliant.
Gap Wash: 120 degree nozzlesLoad Cup Wafer Exchanger:
Enhanced counter balance springs
Nova 3090 Ready: None
Monitor 1 Location : Cart
Monitor 2 Location : Ergo Arm type
Light Tower: Factory Interface and Polisher Sides
SoftwareLK Software: lp3B4.
5_29Factory Interface : fb
4.9_14 BetaI
SRM / RTPC: isB3.0_10RTPC: B3.0_11
Platen 1
Platen Type : HIGH SPEED (