Applied Materials Endura 5500 PVD

APPLIED MATERIALS AMAT 5500 ENDURA PVD consisting of:
- Model: 5500 Endura
- 2 DPS / DTM Chambers
- Ebara System & Load Lock Pumps
- Configured for 200mm
- Used Minimally for R&D & Light Production (~50k wafers run total)
- Vintage: 2019

LOAD LOCK / CASSETTE CONFIGURATION:
- LLK A & B: Wide Body
- LLK A & B Indexer and Handler Type: Platform

ROBOTS:
- Transfer Chamber: HP+
- Transfer Chamber Blade: Ceramic

CHAMBER TYPE / LOCATION:
- Chamber A: Pass-thru
- Chamber B: Cool Down
- Chamber C: Pre-Clean
- Chamber C Process: PCII
- Chamber D: Blank
- Chamber 1: Blank
- Chamber 2 & 3: Wide Body
- Chamber 2 & 3 Process: Carbide or CrSi
- Chamber 2 & 3 Heater: B101 Heater
- Chamber 2 & 3 DC Supply: Pinnacle Plus-DC 0190-70897
- Chamber 2 & 3 RF Generator: Comdel CX600s 0190-63347

HEAT EXCHANGER CONFIGURATION:
- Neslab III

CHAMBER A & B GAS CONFIGURATIONS:
- Ar
- N2
- O2