ATV Technologie PEO 603
Ref :
2629589-9-CP
Condition :
Used
Manufacturer :
ATV Technologie
Model :
PEO 603
Year(s) :
2000
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
This furnace can handle wafers up to 150mm
Configuration:
N2 - 1500 l/min
N2 - 660 l/min
Forming Gas 660l/min
Temperature Control 0°C – up to 500°C max.
Free Ramping (up to 99 steps max., one step up to 99,99 °C max.)
Stainless Steel Calotte 0 – 5kg
Wafer Size Range
Minimum 50 mm
Maximum 150 mm
Set Size 150 mm
Number of Furnace Tubes 1
CE Marked YES
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