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Used CVD Equipment

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1

- Substrate Size Up To 4" - Max Temperature: 1100°C - Base Pressure:<10 - Process Gases: Argon, Hydrogen, Meth... Year(s) : 2011 Location : AMERICA North (USA-Canada-Mexico)

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Max Wafer: 200mm System Dimensions: 23x43x63 Configuration: 8" Wafer capable, 460mm electrode, 400C subst... Year(s) : 2004 Location : AMERICA North (USA-Canada-Mexico)

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Minimum 100 mm Maximum 200 mm Set Size 150 mm Number of Chambers 3 Other Information Tool are in pro... Year(s) : 1996 Location : EUROPE (Western and Northern)

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PVD: Sputter Year(s) : 2004 Location : ASIA (North East)

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Specifications: Parallel plate 15" chamber Microprocessor controller 11" electrode 500 Watt @... Location : AMERICA North (USA-Canada-Mexico)

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Features: Capable of 100mm, 125mm, 150mm, and 200mm wafer processing Process extendibility from 0.5 mi... Location : AMERICA North (USA-Canada-Mexico)

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Specifications: Software version: 2.85.6 Process extendibility from 0.5 micron to 0.08 micron WJ-9... Location : AMERICA North (USA-Canada-Mexico)

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Syskey Substrate Size: up to 12” Thickness uniformity: <±3% 10-10 Torr Ultimate vacuum Subs... Location : AMERICA North (USA-Canada-Mexico)

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brooks back bone , Two Tools available VCE6 , Mag 7 Robot Location : EUROPE (Western and Northern)

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Schumacher ATS-15 TLC ABU/TLC Temperature Control System Dopant Bubbler. Trans-LC quartz system temperature ra... Location : AMERICA North (USA-Canada-Mexico)

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AMAT ENDURA CL Pumps and Chillers Included Location : EUROPE (Western and Northern)

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Novellus Concept 1 Part number: GOD29072016-015. Concept 1 TEOS TEOS Location : EUROPE (Western and Northern)

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- Concept One 200mm Base System - Micro-Contamination Package. - Dual Frequency System with AE LF PDX 1400 Gen... Location : AMERICA North (USA-Canada-Mexico)

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Foreline LF Generator Upgrade NF3 Upgrade PCW piping Process Gases: Silane Diborane... Location : AMERICA North (USA-Canada-Mexico)

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AMAT / APPLIED MATERIALS Chamber for Centura DxZ Location : AMERICA North (USA-Canada-Mexico)

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WxZ CVD Chamber for Centura, 8". spare part Location : AMERICA North (USA-Canada-Mexico)

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ASP Chamber SPARE PARTS Location : AMERICA North (USA-Canada-Mexico)

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CVD: APCVD/BPSG/8in. Year(s) : 2000 Location : ASIA (North East)

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CVD: LPCVD Location : ASIA (North East)

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Vector Express Description CVD Location : ASIA (North East)

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System Includes: AMAT Applied Materials 0190-02955 Centura Factory Interface FFU-AMT -S1 AMAT Applied Material... Year(s) : 2002 Location : EUROPE (Western and Northern)

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TISI ID 150901-72 Manufacturer TEL Model Alpha 8S Description LPCVD TEOS 1 System Wafer Size 200mm V... Location : ASIA (North East)

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TISI ID 151012-176 Manufacturer Oxford Model Plasmalab800+PECVD Description PECVD Location : ASIA (North East)

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TISI ID 151012-177 Manufacturer Oxford Model Plasmalab800+PECVD Description PECVD Location : ASIA (North East)

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TISI ID 151012-175 Manufacturer Oxford Model Plasmalab800+PECVD Description PECVD Location : ASIA (North East)

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