AMAT, Applied Materials Centura II CVD

APPLIED MATERIALS AMAT 5200 CENTURA II consisting of:
- Model: 5200 Centura II
- 2 DxZ Chambers
- SBC System Controller w/ Vita Controller Upgrade
- Ebara Pumps
- Configured for 200mm
- Used Minimally for R&D & Light Production (~50k wafers run total)
- Vintage: 2019

LOAD LOCK / CASSETTE CONFIGURATION:
- LLK A & B: Wide Body
- LLK A & B Indexer and Handler Type: Platform
- LLK A & B Wafer Slide Detect: Present

ROBOTS:
- Transfer Chamber: HP+
- Transfer Chamber Blade: Ceramic

CHAMBER TYPE / LOCATION:
- Chamber A & B Chamber Body Type: DxZ Chamber
- Chamber A & B Process: Silane or Nitrade
- Chamber A & B Heater / Pedestal Type: MS Lift / DxZ Heater Lift
- Chamber A & B Lid Type: DxZ Lid/w RPS unit
- Chamber A & B RF Generator: PDX 900 2v
- Chamber A & B Match: RFG2000
- Chamber C, D & E Chamber Body Type: Blank
- Chamber C, D & E Process: N/A
- Chamber F Chamber Body Type: Orienter
- Chamber F Heater / Pedestal Type: Standard

HEAT EXCHANGER CONFIGURATION:
- SMC INR-498-012E-X 028 -32036

CHAMBER A & B GAS CONFIGURATIONS:
- SiH4
- NF3
- C3H6
- NH3
- N2O
- O2
- He
- Ar