AMAT Centura HDP

Software: Win 10 ;
OR 4000 WTM Controller;
3x ENI Generator Racks, Chiller INR-498-011D;
2x Remote Monitor;
High Density Plasma Process;
Process Chambers: A,B,D;
Orienter chamber F;
Software: Win 10 ;
OR 4000 WTM Controller;
3x ENI Generator Racks, Chiller INR-498-011D;
2x Remote Monitor;
High Density Plasma Process;
Process Chambers: A,B,D;
Orienter chamber

Set Size200 mm
Number of Chambers3
Process GasesPH3, SiH4, NF3, He, Argon, O2

Other Information
System: 1x Mainframe;
3x process chamber;
1x Controller Rack;
1x Chiller;
3x ENI Generator Racks (Converted to separate water supply each Generator)

System:
1x Mainframe;
3x process chamber;
1x Controller Rack;
1x Chiller;
3x ENI Generator Racks (Converted to separate water supply each Generator)

AMAT Vita/Delphin Controller; Tool will be sold without Software
Power Requirements 208 V 100.0 A 50/60 Hz 3 Phase
CE Marked YES
Year of Manufacture 1999
Refurbished YES
Condition Good

Exterior Dimensions
Width1,056.693 in (2,684.0 cm)
Depth986.220 in (2,505.0 cm)
Height944.882 in (2,400.0 cm)
Weight3,748 lb (1,700 kg)