AMAT Epi Centura

Software Ver: B6.50
CB1 Amps: 300A
Vita Controller
Flow Point Model: Nano Valve
Gas Panel Type: Configurable
Wafer Size: 200mm (with conversion kit 150mm is possible)
M-Monitor: CRT
3 Chambers ATM EPI
With digital Flow-Control of the cooling systems with
interlock and passphrase (Simens PLC)
Standard pneumatic waferlift
Center Finding System: OTF
Buffer robot: HP+
Piezocon sensor: No
VSB: Yes
Wide Body LL
Tool called "EPI39"
EPI 39 - AMAT EPI CENTURA

Wafer Size Range
Minimum 150 mm
Maximum 200 mm
Set Size 150 mm

Number of Chambers 3
Controller Type Other Controller Type
Cassette to Cassette YES
Extended Description Details at Konfiguration und Part list EPI39.xlsx
Power Requirements 480 V 120.0 A 50 Hz 3 Phase
Condition Good