AMAT ENDURA 5500

Ref : 2469187-9

Condition : Used

Manufacturer : AMAT

Model : ENDURA 5500

Year(s) : -

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

Specification :
Wafer Size: 200mm
Robot: HP(buffer and Transfer)
Loadlock: Narrow Body
Chamber: A - Pass Thru,
B - Cooldown,
C - PreClean PIK II,
E, F - Orienter/Degas,
1 - Widebody AlCu,
2 - Watercool MCA+,
3 - Widebody TiN,
4 - Watercool MCA
9600 Compressor

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