Mill 4123

Vacuum System Cryo Pumped
Vacuum System
Two CTI OnBoard 8 Cryopumps
Leybold B65 roughing pump

Load Lock Included No
Target Size 6" x 24"
Quantity of DC Cathodes 2
Number of RF Etch Cathodes 2
Gas Inputs Three
Gas Input Control Mass Flow Controllers
Substrate Heaters No
Residual Gas Analyzer No
DC Power Supply
Manufacturer Advanced Energy (2 included)
Model MDX 30K
Output Power 30.00 kW DC
RF Generator
Manufacturer Advanced Energy
Model RFX-1250
Rated Power Output 1250 Watts
Frequency Advanced Energy
Matching Network Yes
Accessories
Advanced Energy ATX-1250 matching network
Advanced Energy ATX-CP control panel
Two MKS type 120A pressure transducers
Two MKS type 270 display units
MKS type 248A upstream pressure control valve
MKS type 250C pressure/flow controller
MKS type 247C four channel mas flow controller
Three MKS type 2159B mass flow control controllers
Granville Phillips type 302 ionization gauge controller with TC and process control modules