Watkins Johnson WJ999 TEOS V3.5

Ref : 2784978-9-CP

Condition : Used

Manufacturer : Watkins Johnson

Model : WJ999 TEOS V3.5

Year(s) : 1996

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

TEOS APCVD FOR USG / PSG AND BPSG
Version: 150 mm
WJ-TEOS999-3.5
WJ-996-11.4
Sorbios semozon 250.3
3x IVAs with Monoblock
208vac 3 phase

canisters
3 x (TEOS,TMB,TMPI)
CRS 958
no. bubblers : 9
belt clean: HF Bubbler

Process configuration
500 deg c under the injectors
Process cooling water
MKS type throttle vavle with controller
Toroidal Orifices: 6 x 3" with a single spring
Process belt: Inconel based.

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