974 i Sputtering System

Manufacturer KDF
Si Doped Reactive
974i KDF (includes Four std. 24.4" planar cathodes)
Water Pump CTI MDL 550
Upgrade 10" Process Cryo To Osaka Mag-Lev - Tgkine 3304MBWB-B Turbo
Delete Four 24.4" Planar Cathodes
Add Three 24.4" LMM Linear Moving Magnetron Cathodes for Si Doped Reactive
Add One 24.4" MU Inset Cathode Four Piece Cathode for Chrome
Upgrade to Tri-Sputter with Three 10Kw Pinnacle Plus Pulse DC Capability
Upgrade to three Reactive Gas Rings and 7 Mass Flow Meter Balance Control 6 for Tr-put
Delete Moving Shutter Install Fixed Shutters
RF Option AE Dressler 3.0Kw RF Etch
One Spare Shield set
Three Spare LMM DSS Dark Space Shields
One Spare MU Dark Space Shield
Front & Rear Haynes 242 Alloy Chain Shields two sets
H20 Cooled Anode Plate
H20 Cooled Chamber Plates
Four Cool Plates For Dark Space Shields LMM & MU
IR Substrate Temp Monitor Variable Emissivity in Recipie
Option: Upgrade lon Gauges on Cryo & Turbo - Using MKS 909AR read only
Light Tower
Two Edwards iLX Dry Rough Pumps
Cathode Removal Tool
CE Certified & SEMI S2-0200 & NFPA 79
Two Flat SS Pallets
2022 Vintage