Ulvac SIV 500

Ref : 2782652-9-CP

Condition : Used

Manufacturer : Ulvac

Model : SIV 500

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

• 3-station process module (P1, P2, P3)
• 5 kW pulsed DC power supply
• P3 dedicated to ITO or other TCF
• P3 has O₂ MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry
• L/L has roughing pump and water pump
• Process chamber has roughing pump, T-ed to turbo/water pump & cryo pump
manual load, (1) 500 × 500 mm carrier; uses Ulvac 12" cryo & 12" water pump/turbo
Voltage: 208 VAC +/- 5%, 3 phase, 60 Hz 3 wire plus ground, 145.5 A

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