Ulvac VPC-260F

• Operation: Manual
• Vacuum Chamber Type: Glass bell jar
• Vacuum Chamber Inner Diameter: Approx. 300 mm
• Vacuum Chamber Height: Approx. 300 mm
• Evaporation Electrode: 2-pole switching
• Evaporation Power: 0–10 V
• Maximum Evaporation Current: 150 A
• Main Pump Type: Oil diffusion pump
• Main Pump Model: DPF-200
• Main Pump Cooling: Air-cooled
• Main Pump Speed: 200 L/s
• Back-Up Pump Type: Oil rotary vacuum pump
• Back-Up Pump Model: G-100D
• Back-Up Pump Speed: 100 L/min
• Main Valve Type: Clapper valve
• Main Valve Model: VG-65
• Auxiliary Valve Type: Three-way valve
• Liquid Nitrogen Trap Capacity: Approx. 0.75 L
• Cooling Water Usage: Film thickness sensor
• Cooling Water Flow Rate: 200 cc/min
• Power Supply (Main Unit): Single-phase 100 V, 50/60 Hz
• Power Supply (Gauges and Controller): Single-phase 100 V, 50/60 Hz
• External Width (Main Unit): Approx. 700 mm
• External Depth (Main Unit): Approx. 650 mm
• External Height (Main Unit): Approx. 1200 mm
• Weight (Main Unit): Approx. 75 kg
• External Width (Instruments Unit): Approx. 450 mm
• External Depth (Instruments Unit): Approx. 650 mm
• External Height (Instruments Unit): Approx. 1100 mm
• Weight (Instruments Unit): Approx. 50 kg
• Included Vacuum Gauge: Pirani vacuum gauge
• Pirani Gauge Model: ULVAC GP-1G
• Pirani Probe Model: WP-01
• Included Vacuum Gauge: Ionization vacuum gauge
• Ionization Gauge Model: ULVAC GI-TL3RY
• Ionization Probe Model: WIT-G1 Φ18
• Evaporation Power Supply: Included
• Remote Control Function: Included
• Film Thickness Controller Model: ULVAC CRTM-6000
• Adhesion Prevention Plates: Included