Axcelis GSD200E2
EUROPE (Western and Northern)
Voltage: 208V
Cryo-Pumps: CTI/Edwards Onboard: OB-8 + OB-10
Cryo-Kompressor: CTI 9650 Low-Voltage
Source-Turbo-Pump: Seiko/Edwards STPA2203C
Beamline-Turbo Pump: Oerlikon MAG W 1300 C
Terminal-Rough-Pump: without (Edwards IGX Config)
Endstation Rough-Pump: without (Edwards IGX Config)
Wafersize: 200mm
Disk-Type: Si-coated Disk
Wafer-Cooling: no Disk-Chiller included !
Gasbox: 5-String, 4x 2L Size
String1: KrH2 High-Pressure Type VCR 1/4";
MFC Brooks GF120 10sccm-N2
String2: BF3 SDS-Low-Pressure Type VCR 1/4";
MFC MKS-1640A; 5sccm-AsH3
String3: AsH3 SDS-Low-Pressure Type VCR 1/2";
MFC MKS-1640A; 5sccm-AsH3
String4: PH3 SDS-Low-Pressure Type VCR 1/2";
MFC MKS-1640A;
String5: Argon Carriergas;
MFC Brooks GF120 10sccm-N2
Disk-Drive: Direct-Drive
Dose-Type: Power-Dose
Source-Type: ELS4 IHC-Source without Vaporizer
Highvoltage-Transformer Source: Oil
Highvoltage-Transformer Terminal: Oil
Light-Tower: red/yellow/green; no buzzer
Main-Workstation SUN Solaris SX1500 4HE
Remote-Workstation SUN Solaris Axi 3HE (special case)
Software-Version: 8.2.1 (no license included)
Network: 24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller: V6 Type
Condition tool run fully productive (24/7) between 15 and 160kv Energy until we switched it off on 01/2025
Notes:
Clean-Room Table on frontside missing
Disk-Removal Tool + Disk-Cart is missing
Disk-Chiller not included
Rough-Pumps not included
Minor modifications on tool like Interlock Type
No Manual-Set/ no Spares included
If required, tool can be inspected on site, but no
Power actually
Description 0-200kv Highcurrent
Condition Good
Year of Manufacture 2011
Power Requirements 208 V
CE Marked YES