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Axcelis NV-GSD3, High Current Ion Implanter

Ref : 1173089-9
Condition : Used
Manufacturer : Axcelis
Model : NV-GSD3, High Current Ion Implanter
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 15 Aug. 2014

Brand: Axcelis
Model: NV-GSD3
HIGH CURRENT ION IMPLANTER

Specifications
• Used
• Front side operator controller: Eaton advanced automation package including
a Sun SPARC 5 workstation with 19 inch color monitor SECS II interface
• Automatic process chamber cleaning system (software and hardware)
• Process disk cooled using remote closed loop disk chiller
• Ion source is enhanced source with enlarged vaporizer
• High voltage power supply: 0.90KeV, capable of 0.-6mA continuous
normal and 275mA maximum operation.
• Supression power supply: 0.-5kV variable
• Process disk (electroplated aluminium) segmented clampless type with
clear RTV, capable of processing thirteen 200mm wafers
• Source area HIVAC pump: Osaka vacuum TH1592BW 1500 1/min turbo with controller
• MFCs: SREC SEC 400
• Works with wafer size 200mm.

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