Axcelis NV8250HT

Type:NV8250HT
Energy Config:0 - 250Kv Midcurrent
Build Year:2002

Date of first usage:buyed new from vendor
Current Condition: Good
CE-Conformity:Yes
Voltage:208V
Cryo-Pumps:3x CTI/Edwards Onboard: OB-8
Cryo-Kompressor:CTI 9650 Low-Voltage
Turbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003C
Rough-Pumps:Edwards: without QDP40, not included
Endstation Rough-Pump:not included
Wafersize:8inch(200mm)
Clamp-Type:E-Chuck green with Non-μC Controller
Wafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507)
(condition unclear)
Gasbox:Modular 5-String, 4x 2,0L Size
String1:Argon Carriergas; MFC Unit-1662 2sccm BF3
String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3
String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3
String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
Beam-Profiler Type:Belt-Drive
Gear-Type's:Scan: Planetary Tilt: Planetary
Source-Type:ELS4 IHC-Source without Vaporizer
HV-Transformer:Silicon-Oil
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSolaris SUN AXI 3HE (Special case)
Second-WorkstationSolaris SUN Sparc5
Software-Version:5.1.4.1
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:177 Type

Condition Notes:
Upper-Rack Panel missing
Clean-Room Table missing on frontside
all 4 wheels on oil-isolation transformer are broken
Minor modifications on tool
No Manual-Set/ no Spares include
tool was used 24/7 full in production between 15
and 230kv Energy
If required, tool can be inspected on site, but no
Power

Description Mid
Current Implanter
Condition Good
Year of Manufacture 2002
Power Requirements 208 V
CE Marked YES