BTI BDF-41 Oxide

OFEN23B Horizontal
Wafer Size Range
Minimum 150 mm
Maximum 200 mm
Set Size 200 mm

Accessories
4 stovepipes that can be operated independently

Other Information
No quartz ware;
Used heating cassette

Condition Good
Year of Manufacture 2001
Power Requirements 380 V 211.0 A 238.0 A(2) 50 Hz 3 Phase