Canon FPA-3000 EX5 DUV

Wafer: 8" , 6" or 4" (for other sizes, please inquire)
Throughput: 85wph (60 shot) 22mm ( 8” Wafer)
Throughput: 110wph (32shot) 22mm ( 6” Wafer)
Reticle: 6" (Nikon Style or Canon Style reticle loader available)

General Specification and Information:
Model: FPA 3000 EX5 (Deep Ultra Violet)
First year available: 1998
Lens Type: ULEX25
Stage Type: FLAT (Fast Liner motor air guided Transfer stage)
Chamber Type: CD110