Canon FPA 3000 i5+

General Configuration:
FPA 3000 - i5(+)
Manufactured in June / 1997
8“ Wafer Chuck, Notch PA unit
6“ Nikon-type Reticle Changer
Reticle Barcode-Reader = yes
Cassette Barcode Reader = yes
Pellicle Particle Checker = yes
Online - ESPA = yes
Interface type: right
Standard flys eye lens
Chamber type: CD80

Wafer Size Range
Minimum 150 mm
Maximum 200 mm
Set Size 200 mm
Cassette to Cassette YES

Other Information
Currently exchanged items ( 2023-2025) :
Illumination Shutter
Stage Laser
Cooling Coil Chamber
Wafer Feeder Roboter
UPS for Workstation

Uniformity / Illumination Data at Lamp hrs 712 h :
uc0:6308
li0:7299
iucVal:2.804
maxVal:105.760
minVal:99.992
areaX:22.0000
areaY:26.0000
pitchX:2.2000
pitchY:2.6000
count:100

Special Illumination Mode 1
Lens NA 0.54 Multiple Stopper sigma 0.77
1st zoom 22.30 [%] input lens none
2nd Zoom Compensator 2 Value Direction
0.0 [%] 44.0 [%] -97.5 [degree]

Condition Good
Year of Manufacture 1997
Power Requirements 50/60 Hz 3 Phase
Weight 3,406 lb (1,545 kg)