Canon FPA-3000 i5

Ref : 2800837-9-GO

Condition : Used

Manufacturer : Canon

Model : FPA-3000 i5

Year(s) : 1998

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer size: 4" / 6" / 8" Flat/Notch (customer may specify per their requirement)
Reticle size: 6" Square
Field Size: 22 X 22 mm

Exposure Light: 365nm
Light Source: 2.0KW Super High Pressure Hg Lamp

Projection Magnification: 1/5 X
Numerical Aperture: 0.63~0.45

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