Canon LITVC1-02

Canon FPA- 5500iZ+
Wafer Size Range
Minimum 300 mm
Maximum 300 mm
Set Size 300 mm
Other Information

Block 2:
- 4x Coater Unit (IC Cup)
- 4 Resist Lines / coater Unit
- 11 Resist pumps "RGEN01" with Entegris Filter Manifold
- 1x RRC / EBR nozzle / coater unit
- Back Rinse Nozzle standard
- 2x adhesion (ADH) unit
- 5x chill plate (CPL)
- 6x standard hot plate (LHP)
- 3x high temperature hot plate (HHP)
- 2x Cup wash holder unit incl. Cup wash disc
- 1x Transfer unit (TRS)
- 1x Transfer chill plate (TCP)

Block 3:
- 4x Developer unit
- 2 Developer Lines (SH - Nozzle) / unit
- 1x Rinse Nozzle / unit
- Back Rinse Nozzle standard
3x chill plate (CPL)
4x chilling hot plate (CHP)
5x standard hot plate (LHP)

Interface Block
- connection Canon iZ Stepper
- 1x WEE unit
- 2x Buffer station
- 1x chill plate (CPL)

Extended Description Details at Configuration_overview_LITVC1-02_ACT12_E200052_010325.xlsx
Condition Good
Power Requirements 200-208 V 50/60 Hz 3 Phase
CE Marked YES