Cascade Microtech ELITE 300

- Wafer Size: 300 mm
- Chuck Type: Femtoguard temperature chuck
- Temperature Range: -60°C to +300°C
- Stage: Precision linear-motor / air-bearing stage
- Z Stage: High-force Z stage
- Positioning: Auto XYZ and theta correction
- Noise Reduction Technologies: PureLine™, AttoGuard®, MicroChamber®
- Imaging System: eVue™ digital imaging system
- Microscope Mount: “Hands-free” high-stability bridge mount
- Productivity Features: VueTrack™ technology, HTS enhancement, unattended multi-temp testing
- Automation Features: Auto die-size measurement, wafer alignment
- Integration: Seamless with Velox and other analyzers/software
- RF/Microwave Capability: Yes, supports WLR, FA, 1/f, and debug
- Mounting System: TopHat™, rotatable platen ring
- Usability: Ergonomic operation, remote microscope control, arm rest, control panel
- Stage Access: Locking roll-out stage
- Condition: Not explicitly stated (assumed New)