Cascade S300 Semiautomatic prober

Form Factor Cascade S300 Semiautomatic prober
with ERS 300mm temperature controlled wafer chuck,
eVue digital microscope, and Nucleus software

300mm semiautomatic prober
Precision linear-motors/ air bearing stage
Sub-micron stepping with auto XYZ and theta correction
eVue 3 digital imaging system with enhanced optical visualization
and remote control
Microchamber with EMI shielding, light attenuation,
and air-purge management
DUT sizes supported; shards or wafers from 50mm to 300mm
Internal pneumatic vibration dampening
Nucleus ver. 4.1 software running on Windows 7 PC

ERS 300mm air cooled thermal chuck with Attoguard and -60 to +300C range