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Clusterline CLN200
Ref :
2748790-9-CP
Condition :
Used
Manufacturer :
-
Model :
Clusterline CLN200
Year(s) :
2000
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Manufacturer Evatec Clusterline
The Clusterline 200 systems offeredis equipped with 5 single process chambers each.
They were used only for reactive sputtering of SiO2 layers on 150mm blank Si wafers.
Both systems are still in a clean room and in working conditions.
Further devices mounted on these tools are: two vacuum loadports each,
wafer aligners, buffer stations for upto 5 wafers, OCR back side readers.
Handler Type MX800.
5x Pulsed DC chambers with RF on Chuck
Configured for 150mm Running in Production.
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