EVG 620 TB

description:
Condition: used, but complete refurbished
Available for full inspection and demonstration
with Topside Alignment (TSA) and Backside Alignment (BSA)
Manual Handling
Manual Controlled Stage
Wafer Size: 6"/150mm
Objectives: 10x
Tooling Tray
Uniformity Test Plate
Lamphouse: 1000W Lamphouse (Optional: 500W / 350W or LED Upgrade Upon Request)
Exposure Optics: Type C, 350nm - 450nm, Broadband
Microsoft Windows based User Interface
System PC, Keyboard, Cables
PDF Manual for EVG 620