EVG 6200 Mask Aligner

EVG 6200 AUTOMATED MASK ALIGNER consisting of:
- Model: EVG6200
- Automated Mask Aligner
- Topside Alignment (TSA), Backside Alignment (BSA)
- 5x Objectives on Top and Backside Alignment
- Automatic Alignment
- 3 Cassette Station for Cassette to Cassette Handling
- Up to 8”/200mm Wafer Capable (with proper chuck)
- Vacuum Chuck: for 8" wafers
- Maskholder: for 9"x9” masks
- Mask Load Frame: for 9"x9” masks
- Can be Operated in Proximity, Soft Contact,
Hard Contact or Vacuum Contact Exposure Modes
- Tooling Exchanges are Quick, Simple and can be Performed Within Minutes
- Lamphouse: 1000W Lamphouse
- Motorized Alignment Stage (X, Y, Theta Directions) to the 3-Axis Joystick
- Microsoft Windows based User Interface - System PC, Keyboard, Cables
- Operations Manual for EVG 6200 (English language)


MASK ALIGNER REFURBISHMENT PROCESS consists of:
1) Main System Body:
- Ellipsoidal Mirror Replaced with New
- UV Bulb Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Shutter Cylinders Replaced with New
- Mirror House Cylinder Replaced As Needed
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Illumination Bulbs Replaced with New
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed

2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Air lines Inspected & Replaced as Needed
- Wheels Inspected & Replaced as Needed
- Leveling Feet Inspected & Replaced as Needed

3) If Applicable:
- Transport Slide Rebuilt
- Pre-Aligner Assembly Rebuilt
- Wafer Alignment Stage Rebuilt
- Cassette Elevator Rebuilt

Condition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.