FILMETRICS Profilm3D

• Measurement Technology: White Light Interferometry (WLI)
• Measurement Technology: Vertical Scanning Interferometry
• Measurement Technology: Phase-Shifting Interferometry (PSI)
• Measurement Technology: Global Light Interferometry (GLI)
• Imaging Technology: TotalFocus®
• Measurement Resolution: Sub-nanometer level
• Imaging: 3D natural-color imaging
• Imaging: Every pixel in focus
• Enhanced Roughness Imaging: Included
• Surface Measurement: Rougher surfaces
• Surface Measurement: Higher slopes
• Surface Measurement: Lower-reflectivity surfaces
• Autofocus: Included
• Turret: 4-position motorized turret
• Automatic Stage: 100 × 100 mm
• Interferometric Objective: 10× Mirau
• Interferometric Objective: 50× Mirau