Fusion

Ref : 1831165-9-GO

Condition : Used

Manufacturer : Fusion

Model : -

Year(s) : -

Quantity : 0

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 07 Jun. 2018

Fusion Ozone Asher 200AC

*Ozone Asher
*Dry chemical ashing to remove photoresist from semiconductor substrates
*No RF or uWave Plasma
*Dry chemical process
*Atmoshperic pressure
*Infinite substrate selectivity
*End point detection
*Fast ashing rates
*Low particulates
*Single wafer operation
*Cassette to cassette wafer handling 4" to 8"
*Wafer capability
*Modular system design

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